8/28/2010	1:35:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2010	1:35:16 PM	Recipe started at 1:35 PM
8/28/2010	1:35:16 PM	Helium valve closed
8/28/2010	1:35:16 PM	H2 valve closed
8/28/2010	1:35:16 PM	BCl3 valve closed
8/28/2010	1:35:16 PM	PH3 valve closed
8/28/2010	1:35:16 PM	SiCl4 pre valve closed
8/28/2010	1:35:16 PM	SiCl4 post valve closed
8/28/2010	1:35:16 PM	Main Vac valve closed
8/28/2010	1:35:16 PM	Bubbler valve closed
8/28/2010	1:35:16 PM	Bypass valve opened
8/28/2010	1:35:16 PM	Helium MFC set to  0.000000
8/28/2010	1:35:16 PM	H2 MFC set to  0.000000
8/28/2010	1:35:16 PM	BCl3 MFC set to  0.000000
8/28/2010	1:35:16 PM	PHl3 MFC set to  0.000000
8/28/2010	1:35:16 PM	SiCl4 MFC set to  0.000000
8/28/2010	1:35:16 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	1:35:16 PM	Tube furnace set to 0
8/28/2010	1:35:56 PM	Helium valve closed
8/28/2010	1:35:56 PM	H2 valve closed
8/28/2010	1:35:56 PM	BCl3 valve closed
8/28/2010	1:35:56 PM	PH3 valve closed
8/28/2010	1:35:56 PM	SiCl4 pre valve closed
8/28/2010	1:35:56 PM	SiCl4 post valve closed
8/28/2010	1:35:56 PM	Bubbler valve closed
8/28/2010	1:35:56 PM	Main Vac valve opened
8/28/2010	1:35:56 PM	Bypass valve opened
8/28/2010	1:35:56 PM	Helium MFC set to  0.000000
8/28/2010	1:35:56 PM	H2 MFC set to  0.000000
8/28/2010	1:35:56 PM	BCl3 MFC set to  0.000000
8/28/2010	1:35:56 PM	PHl3 MFC set to  0.000000
8/28/2010	1:35:56 PM	SiCl4 MFC set to  0.000000
8/28/2010	1:35:56 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	1:35:56 PM	Tube furnace set to 0
8/28/2010	1:35:57 PM	Run finished at 1:35 PM
8/28/2010	1:35:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2010	3:11:39 PM	Helium valve opened
8/28/2010	3:11:41 PM	Helium MFC set to  100.000000
8/28/2010	3:25:48 PM	Helium valve closed
8/28/2010	3:55:06 PM	Recipe started at 3:55 PM
8/28/2010	3:55:06 PM	Helium valve closed
8/28/2010	3:55:06 PM	BCl3 valve closed
8/28/2010	3:55:06 PM	PH3 valve closed
8/28/2010	3:55:06 PM	SiCl4 pre valve closed
8/28/2010	3:55:06 PM	SiCl4 post valve closed
8/28/2010	3:55:06 PM	Main Vac valve closed
8/28/2010	3:55:06 PM	Bypass valve closed
8/28/2010	3:55:06 PM	Bubbler valve closed
8/28/2010	3:55:06 PM	H2 valve opened
8/28/2010	3:55:06 PM	Helium MFC set to  0.000000
8/28/2010	3:55:06 PM	H2 MFC set to  500.000000
8/28/2010	3:55:06 PM	BCl3 MFC set to  0.000000
8/28/2010	3:55:06 PM	PHl3 MFC set to  0.000000
8/28/2010	3:55:06 PM	SiCl4 MFC set to  0.000000
8/28/2010	3:55:06 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	3:55:07 PM	Tube furnace set to 100
8/28/2010	3:56:29 PM	Helium valve closed
8/28/2010	3:56:29 PM	BCl3 valve closed
8/28/2010	3:56:29 PM	PH3 valve closed
8/28/2010	3:56:29 PM	SiCl4 pre valve closed
8/28/2010	3:56:29 PM	SiCl4 post valve closed
8/28/2010	3:56:29 PM	Main Vac valve closed
8/28/2010	3:56:29 PM	Bypass valve closed
8/28/2010	3:56:29 PM	H2 valve opened
8/28/2010	3:56:29 PM	Bubbler valve opened
8/28/2010	3:56:29 PM	Helium MFC set to  0.000000
8/28/2010	3:56:29 PM	H2 MFC set to  500.000000
8/28/2010	3:56:29 PM	BCl3 MFC set to  0.000000
8/28/2010	3:56:29 PM	PHl3 MFC set to  0.000000
8/28/2010	3:56:29 PM	SiCl4 MFC set to  0.000000
8/28/2010	3:56:29 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	3:56:30 PM	Tube furnace set to 1000
8/28/2010	4:16:30 PM	Helium valve closed
8/28/2010	4:16:30 PM	PH3 valve closed
8/28/2010	4:16:30 PM	Main Vac valve closed
8/28/2010	4:16:30 PM	Bypass valve closed
8/28/2010	4:16:30 PM	H2 valve opened
8/28/2010	4:16:30 PM	BCl3 valve opened
8/28/2010	4:16:30 PM	SiCl4 pre valve opened
8/28/2010	4:16:30 PM	SiCl4 post valve opened
8/28/2010	4:16:30 PM	Bubbler valve opened
8/28/2010	4:16:30 PM	Helium MFC set to  0.000000
8/28/2010	4:16:30 PM	H2 MFC set to  500.000000
8/28/2010	4:16:30 PM	BCl3 MFC set to  29.000000
8/28/2010	4:16:30 PM	PHl3 MFC set to  0.000000
8/28/2010	4:16:30 PM	SiCl4 MFC set to  50.000000
8/28/2010	4:16:30 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	4:16:30 PM	Tube furnace set to 1000
8/28/2010	4:22:30 PM	H2 valve closed
8/28/2010	4:22:30 PM	BCl3 valve closed
8/28/2010	4:22:30 PM	PH3 valve closed
8/28/2010	4:22:30 PM	SiCl4 pre valve closed
8/28/2010	4:22:30 PM	SiCl4 post valve closed
8/28/2010	4:22:30 PM	Main Vac valve closed
8/28/2010	4:22:30 PM	Bypass valve closed
8/28/2010	4:22:30 PM	Helium valve opened
8/28/2010	4:22:30 PM	Bubbler valve opened
8/28/2010	4:22:30 PM	Helium MFC set to  500.000000
8/28/2010	4:22:30 PM	H2 MFC set to  0.000000
8/28/2010	4:22:30 PM	BCl3 MFC set to  0.000000
8/28/2010	4:22:30 PM	PHl3 MFC set to  0.000000
8/28/2010	4:22:30 PM	SiCl4 MFC set to  0.000000
8/28/2010	4:22:30 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	4:22:30 PM	Tube furnace set to 0
8/28/2010	4:42:30 PM	Helium valve closed
8/28/2010	4:42:30 PM	H2 valve closed
8/28/2010	4:42:30 PM	BCl3 valve closed
8/28/2010	4:42:30 PM	PH3 valve closed
8/28/2010	4:42:30 PM	SiCl4 pre valve closed
8/28/2010	4:42:30 PM	SiCl4 post valve closed
8/28/2010	4:42:30 PM	Main Vac valve closed
8/28/2010	4:42:30 PM	Bypass valve closed
8/28/2010	4:42:30 PM	Bubbler valve closed
8/28/2010	4:42:30 PM	Helium MFC set to  0.000000
8/28/2010	4:42:30 PM	H2 MFC set to  0.000000
8/28/2010	4:42:30 PM	BCl3 MFC set to  0.000000
8/28/2010	4:42:30 PM	PHl3 MFC set to  0.000000
8/28/2010	4:42:30 PM	SiCl4 MFC set to  0.000000
8/28/2010	4:42:30 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	4:42:30 PM	Tube furnace set to 0
8/28/2010	4:42:30 PM	Run finished at 4:42 PM
8/28/2010	5:23:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2010	5:23:23 PM	Recipe started at 5:23 PM
8/28/2010	5:23:23 PM	Helium valve closed
8/28/2010	5:23:23 PM	H2 valve closed
8/28/2010	5:23:23 PM	BCl3 valve closed
8/28/2010	5:23:23 PM	PH3 valve closed
8/28/2010	5:23:23 PM	SiCl4 pre valve closed
8/28/2010	5:23:23 PM	SiCl4 post valve closed
8/28/2010	5:23:23 PM	Main Vac valve closed
8/28/2010	5:23:23 PM	Bubbler valve closed
8/28/2010	5:23:23 PM	Bypass valve opened
8/28/2010	5:23:23 PM	Helium MFC set to  0.000000
8/28/2010	5:23:23 PM	H2 MFC set to  0.000000
8/28/2010	5:23:23 PM	BCl3 MFC set to  0.000000
8/28/2010	5:23:23 PM	PHl3 MFC set to  0.000000
8/28/2010	5:23:23 PM	SiCl4 MFC set to  0.000000
8/28/2010	5:23:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	5:23:23 PM	Tube furnace set to 0
8/28/2010	5:23:59 PM	Helium valve closed
8/28/2010	5:23:59 PM	H2 valve closed
8/28/2010	5:23:59 PM	BCl3 valve closed
8/28/2010	5:23:59 PM	PH3 valve closed
8/28/2010	5:23:59 PM	SiCl4 pre valve closed
8/28/2010	5:23:59 PM	SiCl4 post valve closed
8/28/2010	5:23:59 PM	Bubbler valve closed
8/28/2010	5:23:59 PM	Main Vac valve opened
8/28/2010	5:23:59 PM	Bypass valve opened
8/28/2010	5:23:59 PM	Helium MFC set to  0.000000
8/28/2010	5:23:59 PM	H2 MFC set to  0.000000
8/28/2010	5:23:59 PM	BCl3 MFC set to  0.000000
8/28/2010	5:23:59 PM	PHl3 MFC set to  0.000000
8/28/2010	5:23:59 PM	SiCl4 MFC set to  0.000000
8/28/2010	5:23:59 PM	Bypass solenoid MFC set to  0.000000
8/28/2010	5:23:59 PM	Tube furnace set to 0
8/28/2010	5:23:59 PM	Run finished at 5:23 PM
8/28/2010	5:23:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
